@article{815731,
  author = {N Materer and R Goodman and S Leone},
  title = {Laser single-photon mass spectrometry measurements of SiCl and SiCl2 during thermal etching of Si(100)},
  year = {1997},
  number = {15},
  month = {1997-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}