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Ar, N2, Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking

Published

Author(s)

R S. Goodman, N Materer, S R. Leone
Citation
Journal of Vacuum Science and Technology B
Volume
15

Citation

Goodman, R. , Materer, N. and Leone, S. (1997), Ar, N2, Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking, Journal of Vacuum Science and Technology B (Accessed June 13, 2024)

Issues

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Created December 31, 1996, Updated October 12, 2021