@article{824036,
  author = {R Goodman and N Materer and S Leone},
  title = {Ar, N2, Cl2 electron cyclotron resonance plasmas measured by time-of-flight analysis: Neutral kinetic energies and source gas cracking},
  year = {1997},
  number = {15},
  month = {1997-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}