An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Gillaspy, J.
, Parks, D.
and Ratliff, L.
(1998),
Highly Charged Ion Masked Ion Beam Lithography, Journal of Vacuum Science and Technology B
(Accessed June 6, 2023)