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Generation of a velocity selected, pulsed source of hyperthermal (1-10 eV) neutral metal atoms for thin film growth studies

Published

Author(s)

M P. Knowles, S R. Leone
Citation
Journal of Vacuum Science and Technology A
Volume
15

Citation

Knowles, M. and Leone, S. (1997), Generation of a velocity selected, pulsed source of hyperthermal (1-10 eV) neutral metal atoms for thin film growth studies, Journal of Vacuum Science and Technology A (Accessed April 28, 2024)
Created December 31, 1996, Updated October 12, 2021