TY  - JOUR
AU  - M Knowles
AU  - S Leone
C2  - Journal of Vacuum Science and Technology A
DA  - 1997-01-01 00:01:00
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology A
PY  - 1997
TI  - Generation of a velocity selected, pulsed source of hyperthermal (1-10 eV) neutral metal atoms for thin film growth studies
ER  -