@article{815236,
  author = {M Knowles and S Leone},
  title = {Generation of a velocity selected, pulsed source of hyperthermal (1-10 eV) neutral metal atoms for thin film growth studies},
  year = {1997},
  number = {15},
  month = {1997-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}