A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Jay F. Marchiando; Joseph Kopanski; J R. Lowney

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Published

February 1, 1998

Author(s)

Jay F. Marchiando, Joseph Kopanski, J R. Lowney

Citation

Journal of Vacuum Science and Technology

Volume

B. 16

Issue

Pub Type

Journals

Citation

Marchiando, J. , Kopanski, J. and Lowney, J. (1998), A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Journal of Vacuum Science and Technology (Accessed May 16, 2026)

Additional citation formats

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created January 31, 1998, Updated October 12, 2021

Was this page helpful?