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A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements

Published

Author(s)

Jay F. Marchiando, Joseph Kopanski, J R. Lowney
Citation
Journal of Vacuum Science and Technology
Volume
B. 16
Issue
1

Citation

Marchiando, J. , Kopanski, J. and Lowney, J. (1998), A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements, Journal of Vacuum Science and Technology (Accessed February 28, 2024)
Created January 31, 1998, Updated October 12, 2021