@article{779276,
  author = {Jay Marchiando and Joseph Kopanski and J Lowney},
  title = {A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements},
  year = {1998},
  number = {B. 16},
  month = {1998-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}