TY  - JOUR
AU  - Jay Marchiando
AU  - Joseph Kopanski
AU  - J Lowney
C2  - Journal of Vacuum Science and Technology
DA  - 1998-02-01 00:02:00
LA  - en
M1  - B. 16
PB  - Journal of Vacuum Science and Technology
PY  - 1998
TI  - A Model Database for Determining Dopant Profiles from Scanning Capacitance Microscope Measurements
ER  -