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In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates

Published

Author(s)

F DiMeo, Richard E. Cavicchi, Stephen Semancik, John S. Suehle, N H. Tea, John A. Small, J T. Armstrong, J T. Kelliher
Citation
Journal of Vacuum Science and Technology A
Volume
16

Citation

DiMeo, F. , Cavicchi, R. , Semancik, S. , Suehle, J. , Tea, N. , Small, J. , Armstrong, J. and Kelliher, J. (1998), In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates, Journal of Vacuum Science and Technology A (Accessed April 14, 2024)
Created February 10, 1998, Updated October 12, 2021