TY  - JOUR
AU  - F DiMeo
AU  - Richard Cavicchi
AU  - Stephen Semancik
AU  - John Suehle
AU  - N Tea
AU  - John Small
AU  - J Armstrong
AU  - J Kelliher
C2  - Journal of Vacuum Science and Technology A
DA  - 1998-02-11 00:02:00
LA  - en
M1  - 16
PB  - Journal of Vacuum Science and Technology A
PY  - 1998
TI  - In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates
ER  -