@article{847001,
  author = {F DiMeo and Richard Cavicchi and Stephen Semancik and John Suehle and N Tea and John Small and J Armstrong and J Kelliher},
  title = {In-Situ Conductivity Characterization of Oxide Thin Film Growth Phenomena on Microhotplates},
  year = {1998},
  number = {16},
  month = {1998-02-11 00:02:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}