Sobolewski, M.
, Langan, J.
and Felker, B.
(1998),
Electrical Optimization of PECVD Chamber Cleaning Plasmas, Journal of Vacuum Science and Technology B
(Accessed January 19, 2026)
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Electrical Optimization of PECVD Chamber Cleaning Plasmas
Published
Author(s)
, J G. Langan, B S. Felker
Citation
Journal of Vacuum Science and Technology B
Volume
16 No. 1
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created February 11, 1998, Updated February 19, 2017