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Electrical Optimization of PECVD Chamber Cleaning Plasmas

Published

Author(s)

Mark A. Sobolewski, J G. Langan, B S. Felker
Citation
Journal of Vacuum Science and Technology B
Volume
16 No. 1

Citation

Sobolewski, M. , Langan, J. and Felker, B. (1998), Electrical Optimization of PECVD Chamber Cleaning Plasmas, Journal of Vacuum Science and Technology B (Accessed March 5, 2024)
Created February 11, 1998, Updated February 19, 2017