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A Simple Fabrication Method for Nanometer-Scale Thin-Metal Stencils

Published

Author(s)

Neil M. Zimmerman
Citation
Journal of Vacuum Science and Technology B
Volume
15
Issue
2

Citation

Zimmerman, N. (1997), A Simple Fabrication Method for Nanometer-Scale Thin-Metal Stencils, Journal of Vacuum Science and Technology B, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=11369 (Accessed April 16, 2024)
Created March 1, 1997, Updated August 20, 2018