TY - JOUR AU - Neil Zimmerman C2 - Journal of Vacuum Science and Technology B DA - 1997-03-01 LA - en M1 - 15 PB - Journal of Vacuum Science and Technology B PY - 1997 TI - A Simple Fabrication Method for Nanometer-Scale Thin-Metal Stencils UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=11369 ER -