@article{97851,
  author = {Neil Zimmerman},
  title = {A Simple Fabrication Method for Nanometer-Scale Thin-Metal Stencils},
  year = {1997},
  number = {15},
  month = {1997-03-01},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=11369},
  language = {en},
}