Germer, T.
, Seiler, D.
, Bullis, W.
, Diebold, A.
, Mcdonald, R.
and Shaffner, T.
(1998),
Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection, Characterization and Metrology for ULSI Technology
(Accessed February 12, 2025)