@article{125541,
  author = {Thomas Germer and D Seiler and W Bullis and A Diebold and R Mcdonald and T Shaffner},
  title = {Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection},
  year = {1998},
  number = {449},
  month = {1998-01-01},
  publisher = {Characterization and Metrology for ULSI Technology},
  language = {en},
}