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Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes

Published

Author(s)

A Schwabedissen, Eric C. Benck, J R. Roberts
Citation
Plasma Sources Science & Technology
Volume
7

Citation

Schwabedissen, A. , Benck, E. and Roberts, J. (1998), Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes, Plasma Sources Science & Technology (Accessed April 24, 2024)
Created January 1, 1998, Updated February 17, 2017