TY  - JOUR
AU  - A Schwabedissen
AU  - Eric Benck
AU  - J Roberts
C2  - Plasma Sources Science & Technology
DA  - 1998-01-01
LA  - en
M1  - 7
PB  - Plasma Sources Science & Technology
PY  - 1998
TI  - Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes
ER  -