@article{141431,
  author = {A Schwabedissen and Eric Benck and J Roberts},
  title = {Comparison of electron density measurements in planar inductively coupled plasmas by means of the plasma oscillation method and Langmuir probes},
  year = {1998},
  number = {7},
  month = {1998-01-01},
  publisher = {Plasma Sources Science & Technology},
  language = {en},
}