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Investigations in the Sheath Region of a Radio Frequency Biased Inductively Coupled Discharge

Published

Author(s)

Eric C. Benck, A Schwabedissen, A. T. Gates, J R. Roberts
Citation
Journal of Vacuum Science and Technology A
Volume
16

Citation

Benck, E. , Schwabedissen, A. , Gates, A. and Roberts, J. (1998), Investigations in the Sheath Region of a Radio Frequency Biased Inductively Coupled Discharge, Journal of Vacuum Science and Technology A (Accessed May 24, 2024)

Issues

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Created January 1, 1998, Updated February 17, 2017