Benck, E.
, Schwabedissen, A.
, Gates, A.
and Roberts, J.
(1998),
Investigations in the Sheath Region of a Radio Frequency Biased Inductively Coupled Discharge, Journal of Vacuum Science and Technology A
(Accessed December 12, 2024)
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Investigations in the Sheath Region of a Radio Frequency Biased Inductively Coupled Discharge
Published
Author(s)
, , A. T. Gates,
Citation
Journal of Vacuum Science and Technology A
Volume
16
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 1998, Updated February 17, 2017