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Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, David W. Berning, R. Alvis, H. E. Smith
Citation
Journal of Vacuum Science and Technology

Citation

Kopanski, J. , Marchiando, J. , Berning, D. , Alvis, R. and Smith, H. (1998), Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions, Journal of Vacuum Science and Technology (Accessed April 12, 2024)
Created December 31, 1997, Updated October 12, 2021