Kopanski, J.
, Marchiando, J.
, Berning, D.
, Alvis, R.
and Smith, H.
(1998),
Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions, Journal of Vacuum Science and Technology
(Accessed December 3, 2024)
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Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions
Published
Author(s)
, , , R. Alvis, H. E. Smith
Citation
Journal of Vacuum Science and Technology
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Journals
Citation
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Created December 31, 1997, Updated October 12, 2021