Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions

Published

Author(s)

Joseph Kopanski, Jay F. Marchiando, David W. Berning, R. Alvis, H. E. Smith
Citation
Journal of Vacuum Science and Technology

Citation

Kopanski, J. , Marchiando, J. , Berning, D. , Alvis, R. and Smith, H. (1998), Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions, Journal of Vacuum Science and Technology (Accessed March 29, 2024)
Created December 31, 1997, Updated October 12, 2021