@article{794571,
  author = {Joseph Kopanski and Jay Marchiando and David Berning and R. Alvis and H. Smith},
  title = {Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions},
  year = {1998},
  month = {1998-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}