@article{794571, author = {Joseph Kopanski and Jay Marchiando and David Berning and R. Alvis and H. Smith}, title = {Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions}, year = {1998}, month = {1998-01-01 00:01:00}, publisher = {Journal of Vacuum Science and Technology}, language = {en}, }