TY  - JOUR
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - David Berning
AU  - R. Alvis
AU  - H. Smith
C2  - Journal of Vacuum Science and Technology
DA  - 1998-01-01 00:01:00
LA  - en
PB  - Journal of Vacuum Science and Technology
PY  - 1998
TI  - Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles Across Junctions
ER  -