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Nanostructure Fabrication and Measurement Group

Creates positive feedback between making and measuring nanostructures, to cultivate new capabilities for nanotechnology and nanomanufacturing.

The Nanostructure Fabrication and Measurement Group has established and is exploring a virtuous cycle of making and measuring nanostructures, with the goal of developing approaches that are broadly deployable in research and manufacturing. By creating and advancing methods to measure nanofabrication processes, we improve understanding and quality of nanostructure fabrication. We then apply accurate and precise nanostructures to make metrology methods as good as in the lab, as fast as in the fab. This positive feedback loop improves the theory and practice of fabrication processes, supports the development of novel device technologies, and enables new measurements at the nanometer scale. In this way, the Division creates new capabilities of accuracy and efficiency for nanotechnology and nanomanufacturing. Stakeholder needs inform a current focus on three application areas of production of photonic, electronic, and fluidic devices, innovation of microscopy methods, standards, and calibrations, and characterization of nanoparticle products and nanoplastic byproducts.

News and Updates

Projects and Programs

Atomic-force microscopy

Atomic-force microscopy is a reference method for traceable and correlative measurements of nanostructures. The Nanostructure Fabrication and Measurement Group

Biomolecular assembly

Biomolecular assembly allows the integration of nanoscale components into functional nanostructures. The Nanostructure Fabrication and Measurement Group

Electron-beam lithography

Electron-beam lithography enables fine control of nanostructure features that form the basis of diverse nanotechnologies. The Nanostructure Fabrication and

Electron-Solid Interactions

Fundamental understanding of electron-solid interactions is key to interpreting electron microscopy images for quantitative metrology. Scanning electron


Revealing thermodynamics of DNA origami folding via affine transformations

Jacob M. Majikes, Paul N. Patrone, Daniel R. Schiffels, Michael P. Zwolak, Anthony J. Kearsley, Samuel P. Forry, James A. Liddle
Structural DNA nanotechnology, as exemplified by DNA origami, has enabled the design and construction of molecularly precise objects for a myriad of


2010 APS Fellow - John Kasianowicz

For his pioneering contributions to the field of biophysics including the detection, identification, characterization and quantification of


Group Leader

General Information