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Microsystems and Nanotechnology Division

The Division advances nanofabrication technologies and uses them to develop innovative integrated measurement microsystems.

Welcome to the Microsystems and Nanotechnology Division

Historical advances in precision control of materials, devices, and information have led to multiple revolutions in science, technology, and industry. New measurement science has preceded each step forward – if we can measure it, then we can make it. Nanoscale measurements underly the ability to fabricate diverse nanotechnologies, create devices that manipulate photons, phonons, and plasmons at the quantum limit, and probe the structures and functions of atoms, (bio)molecules, and particles. Achieving control and understanding at the smallest scales requires new approaches. The Microsystems and Nanotechnology Division develops measurement science and technology to advance the state of the art of nanofabrication and nanomanufacturing and applies these novel capabilities to make innovative, integrated microsystems for critical applications.

The division works on three synergistic research thrusts: nanostructure fabrication and measurement; biophysical and biomedical measurement and technology; and photonics and optomechanics. Each of these is led by the corresponding group. Our major programs are listed below.

News and Updates

Projects and Programs

Atomic-force microscopy

Atomic-force microscopy is a reference method for traceable and correlative measurements of nanostructures. The Nanostructure Fabrication and Measurement Group

Biomolecular assembly

Biomolecular assembly allows the integration of nanoscale components into functional nanostructures. The Nanostructure Fabrication and Measurement Group


CNST Nanolithography Toolbox

The Nanolithography Toolbox is a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and


MOSAIC is a modular single-molecule analysis toolbox to decode multi-state single-molecule and nanopore time-series data. Read the documentation for additional


Press Coverage


Closed-loop Controlled Chemical Apparatus

NIST Inventors
Arvind Balijepalli , Curt A. Richter and Son T. Le
A closed-loop controlled chemical apparatus includes: a compound sensor including: an analyte sensor and that: produces, by the analyte sensor, a voltage signal; a reference sensor in electrical communication with the analyte sensor; a transistor including a gate terminal such that a drain current


NIST Inventors
Marcelo Davanco
A single quantum emitter single photon source produces a single photon stream and includes: a single-mode excitation waveguide that receives a pump light, propagates pump light as resonant excitation light, and produces evanescent excitation light; a separation gap between single-mode excitation


NIST Inventors
Glenn Holland
A non-vacuum, non-contact spinner wafer chuck including: a basal member including; a fastener receiver that receives a fastener; a chuck collar including: an inner collar wall; and an outer collar wall; and an engagement surface that: receives and engages a wafer; a wafer engagement cam including


Division Chief and Deputy Division Chief