Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Microsystems and Nanotechnology Division

The Division advances nanofabrication technologies and uses them to develop innovative integrated measurement microsystems.

Welcome to the Microsystems and Nanotechnology Division

Historical advances in precision control of materials, devices, and information have led to multiple revolutions in science, technology, and industry. New measurement science has preceded each step forward – if we can measure it, then we can make it. Nanoscale measurements underly the ability to fabricate diverse nanotechnologies, create devices that manipulate photons, phonons, and plasmons at the quantum limit, and probe the structures and functions of atoms, (bio)molecules, and particles. Achieving control and understanding at the smallest scales requires new approaches. The Microsystems and Nanotechnology Division develops measurement science and technology to advance the state of the art of nanofabrication and nanomanufacturing and applies these novel capabilities to make innovative, integrated microsystems for critical applications.

The division works on three synergistic research thrusts: nanostructure fabrication and measurement; biophysical and biomedical measurement and technology; and photonics and optomechanics. Each of these is led by the corresponding group. Our major programs are listed below.

News and Updates

Projects and Programs

Atomic-force microscopy

Atomic-force microscopy is a reference method for traceable and correlative measurements of nanostructures. The Nanostructure Fabrication and Measurement Group


CNST Nanolithography Toolbox

The Nanolithography Toolbox is a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and


MOSAIC is a modular single-molecule analysis toolbox to decode multi-state single-molecule and nanopore time-series data. Read the documentation for additional


Press Coverage

Scientists unveil new 'heart-on-a-chip'

Live Science
So-called heart-on-a-chip systems may enable scientists to evaluate the safety and efficacy of new drugs more accurately than they can with animal tests.


Nucleic Acid Nanostructures

NIST Inventors
Jacob Majikes and Veronika Szalai
Embodiments of the present invention relate to methods and composition of a nucleic acid tile with addressable locations for placement of molecular species that can function as sensors, reporters, or enhancers of measurement systems. Embodiments of the present invention may also include a nucleic

Thin Film Magnetic Magnitude Sensor

NIST Inventors
David Gundlach , Emily Bittle and Sebastian Engmann
A novel magnetic field sensor (MFS) may be created with an organic light emitting diode (OLED) made from an organic semiconductor material and an organic photodetector (OPD) built directly on top (or below) of the OLED, wherein one layer is made from a magnetically isotropic material, and which

Optomechanical Ultrasound Detector And Performing Ultrasound Imaging

NIST Inventors
David Long , Thomas W. LeBrun and Jason J. Gorman
An optomechanical ultrasound detector includes: a micromirror substrate; a mechanical resonator that receives ultrasound waves, oscillates at resonator frequency f.sub.r, changes cavity length L.sub.c, and produces intra-cavity light; and an optical microcavity between the micromirror substrate and


Division Chief and Deputy Division Chief