Microsystems and Nanotechnology Division

Our mission is to develop integrated microsystems by advancing the state of the art in nanofabrication, enabling the transfer of NIST measurement technologies to the industrial, academic, and government communities.

News and Updates

What a Switch! NIST-Led Team Develops Tiny Low-Energy Device to Rapidly Reroute Light in Computer Chips

November 14, 2019

Researchers at the National Institute of Standards and Technology (NIST) and their colleagues have developed an optical switch that routes light from one

NIST Goes With the (Slow) Flow: New Technique Could Improve Biotech, Precision Medicine

September 26, 2019

Researchers at the National Institute of Standards and Technology (NIST) have developed an optical system that accurately measures the flow of extraordinarily

Probing the Origin of Alzheimer’s . . . with Transistors

August 7, 2019

A prime suspect in the onset of Alzheimer’s and Parkinson’s diseases is a normally benign enzyme that is essential to proper development of the nervous system

A Bubbly New Way to Detect the Magnetic Fields of Nanometer-Scale Particles

June 10, 2019

As if they were bubbles expanding in a just-opened bottle of champagne, tiny circular regions of magnetism can be rapidly enlarged to provide a precise method

Projects and Programs

Metrologies for Nanobiomaterials in Artificial Photosynthesis

Novel technologies for solar fuel production are expected to increasingly contribute to meeting our nation's environmental and energy needs. Mimicking nature's

Bioelectronic Sensors for Tissue/Organ-on-a-Chip Systems

The use of tissue/organ-on-a-chip systems is limited to endpoint and destructive measurements. Integration of electronic elements in these systems have proven

Three-Dimensional Nanometer Metrology

We use physics theories to understand and simulate the interaction of electrons, light, and mechanical probes with nanometer-scale structures, devices and

Microresonators for inductive-detection electron paramagnetic resonance spectroscopy of volume-limited samples

Planar microresonators are fabricated in the NIST Nanofab, tested in our laboratory, and incorporated into a commercial 9 GHz or NIST-built 34 GHz electron

Software

Cover page for Nanolithography Toolbox manual

CNST Nanolithography Toolbox

October 5, 2016

The Nanolithography Toolbox is a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and

MOSAIC

MOSAIC is a modular analysis toolbox to decode multi-state nanopore data. MOSAIC leverages the underlying physics of the system to considerably increase the