Historical advances in precision control of materials, devices, and information have led to multiple revolutions in science, technology, and industry. New measurement science has preceded each step forward – if we can measure it, then we can make it. Nanoscale measurements underly the ability to fabricate diverse nanotechnologies, create devices that manipulate photons, phonons, and plasmons at the quantum limit, and probe the structures and functions of atoms, (bio)molecules, and particles. Achieving control and understanding at the smallest scales requires new approaches. The Microsystems and Nanotechnology Division develops measurement science and technology to advance the state of the art of nanofabrication and nanomanufacturing and applies these novel capabilities to make innovative, integrated microsystems for critical applications.
The division works on three synergistic research thrusts: nanostructure fabrication and measurement; biophysical and biomedical measurement and technology; and photonics and optomechanics. Each of these is led by the corresponding group. Our major programs are listed below.