Nanoscale and Nanostructure Metrology Group
- Microsystems and Nanotechnology Division Expand or Collapse
- Microsystems and Nanotechnology Division
The Nanoscale and Nanostructure Metrology Group disseminates the SI base unit of length down to the atomic scale. Current focus areas include three-dimensional metrology of nanostructures and nanodevices, including nanoparticles, with development both of advanced laboratory techniques and of theoretical understanding of the sample-instrument interaction that forms the basis for interpreting measurements. The Group develops and applies interferometry methods for measuring displacement and length, and advanced microscopy methods including scanning electron, atomic force, helium ion, and optical.