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Nanoscale and Nanostructure Metrology Group

Develops length measurement science and technology for advanced manufacturing nanotechnology and nanoscience. Measurement capability at this scale is critical for continued nanoelectronics scaling and device integration, and for the innovation of new nanomechanics, photonics, and quantum devices.

The Nanoscale and Nanostructure Metrology Group disseminates the SI base unit of length down to the atomic scale. Current focus areas include three-dimensional metrology of nanostructures and nanodevices, including nanoparticles, with development both of advanced laboratory techniques and of theoretical understanding of the sample-instrument interaction that forms the basis for interpreting measurements. The Group develops and applies interferometry methods for measuring displacement and length, and advanced microscopy methods including scanning electron, atomic force, helium ion, and optical.

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