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Search Publications by: Jason J. Gorman (Fed)

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Displaying 26 - 50 of 73

Identifying spurious modes in RF-MEMS resonators using photoelastic imaging

January 21, 2018
Author(s)
Vikrant J. Gokhale, Jason J. Gorman
This paper reports the first use of dynamic photoelastic imaging for identifying in-plane vibration modes in high-frequency MEMS resonators. In a set of width-extensional mode resonators (WE-BARs), we map fundamental width-extensional modes and unwanted

Parametric resonance in linear microresonators using analog feedback

January 21, 2018
Author(s)
Jason J. Gorman, Vikrant J. Gokhale
This paper reports on the design and implementation of an analog feedback controller for generating parametric resonance in linear microresonators that do not intrinsically demonstrate this phenomenon. It is shown that the controller produces a fundamental

A Photonic MEMS Accelerometer with a Low-Finesse Hemispherical Microcavity Readout

August 13, 2017
Author(s)
Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
This paper describes the design, fabrication, and testing of a photonic MEMS accelerometer that uses a hemispherical microcavity to transduce the motion of the proof mass. The cavity design provides stable operation that is relatively tolerant of

Concave silicon micromirrors for stable hemispherical optical microcavities

June 23, 2017
Author(s)
Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface quality, surface roughness, cavity depth, radius of curvature, and the aspect ratio between the cavity

An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity

February 22, 2016
Author(s)
Yiliang Bao, Felipe Guzman, Arvind Balijepalli, John Lawall, Jacob Taylor, Thomas W. LeBrun, Jason J. Gorman
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the

MEMS Nanopositioners

January 1, 2016
Author(s)
Jason J. Gorman
This book chapter provides a review of the state of the art for MEMS nanopositioners. The motivation for MEMS nanopositioners is presented with respect to the advantages of this technology compared to macroscale mechanisms and the novel applications that

MEMS optomechanical accelerometry standards

July 8, 2015
Author(s)
Felipe Guzman, Yiliang Bao, Jason J. Gorman, John R. Lawall, Jacob M. Taylor, Thomas W. LeBrun
Current acceleration primary standards reach relative uncertainties of the order of 0.001 and consist of complex test facilities, typically operated at National Metrology Institutes. Our research focuses on the development of silicon mechanical oscillator

Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism

April 30, 2013
Author(s)
Mohammad Olfatnia, Siddharth Sood, Jason J. Gorman, Shorya Awtar
This paper reports in-plane electrostatic combdrive actuators with stroke as large as 245 μm that is achieved by employing a novel Clamped Paired Double Parallelogram (C-DPDP) flexure mechanism. The C-DP-DP flexure mechanism design offers high bearing

Automated Multiprobe Microassembly using Vision Feedback

October 5, 2012
Author(s)
John D. Wason, John T. Wen, Jason J. Gorman, Nicholas Dagalakis
This paper describes the algorithm development and experimental results of a vision-guided multi-probe microassembly system. The key focus is to develop the capabilities required for the construction of three dimensional (3D) structures using only planar

A high-bandwidth electromagnetic MEMS motion stage for scanning applications

August 23, 2012
Author(s)
Young M. Choi, Nicholas G. Dagalakis, Jason J. Gorman, Seung Ho Yang, Yong Sik Kim, Jae M. Yoo
This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as

Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism

June 20, 2012
Author(s)
Mohammad Olfatnia, Siddharth Sood, Jason J. Gorman, Shorya Awtar
This paper reports in-plane electrostatic comb-drive actuators with stroke as large as 245 µm, achieved by employing a novel Clamped Paired Double Parallelogram (C-DP-DP) flexure mechanism. For a given flexure beam length (L1), comb gap (G), and actuation

Feedback Control of Optically Trapped Particles

December 17, 2011
Author(s)
Jason J. Gorman, Arvind K. Balijepalli, Thomas W. LeBrun
Optical trapping is a method for manipulating micro- and nanoscale particles that is widely used in biophysics and colloid science, among other areas. This method uses optical forces to confine the position of a particle to a localized region, which is

Vision Guided Multi-Probe Assembly of 3D Microstructures

October 20, 2010
Author(s)
John D. Wason, John T. Wen, Young M. Choi, Jason J. Gorman, Nicholas Dagalakis
This paper describes the operator assisted automated assembly of a 3-legged spatial platform by using a vision guided multi-probe assembly process. This is the first step towards the ultimate goal of building a microscale active spatial platform. Two

Mobile Microrobot Characterization through Performance-Based Competitions

November 19, 2009
Author(s)
Jason J. Gorman, Craig D. McGray, Richard A. Allen
Recent advances in the design and fabrication of microelectromechanical systems (MEMS) have enabled the development of mobile microrobots that can autonomously navigate and manipulate in controlled environments. It is expected that this technology will be

Performance of a Nanopositioner Controller Filter Compensator

August 12, 2009
Author(s)
Donna Le, Nicholas Dagalakis, Jason J. Gorman, Jae M. Yoo
We describe the use of appropriate type simple resistor and capacitor (RC) compensators, which properly connected to a power amplifier, can improve the dynamic performance of MEMS nanopositioners. Research on compensators led to the design of several

Design of an on-chip microscale nanoassembly system

February 10, 2009
Author(s)
Jason J. Gorman, Yong Sik Kim, Andras Vladar, Nicholas G. Dagalakis
A microscale nanoassembly system has been designed for the fabrication of nanodevices and in situ electromechanical characterisation of nanostructures. This system consists of four Microelectromechanical Systems(MEMS)-based nanomanipulators positioned
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