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Search Publications by: Jason J. Gorman (Fed)

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Displaying 51 - 75 of 136

Concave silicon micromirrors for stable hemispherical optical microcavities

June 23, 2017
Author(s)
Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface quality, surface roughness, cavity depth, radius of curvature, and the aspect ratio between the cavity

An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity

February 22, 2016
Author(s)
Yiliang Bao, Felipe Guzman, Arvind Balijepalli, John Lawall, Jacob Taylor, Thomas W. LeBrun, Jason J. Gorman
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the

MEMS Nanopositioners

January 1, 2016
Author(s)
Jason J. Gorman
This book chapter provides a review of the state of the art for MEMS nanopositioners. The motivation for MEMS nanopositioners is presented with respect to the advantages of this technology compared to macroscale mechanisms and the novel applications that

MEMS optomechanical accelerometry standards

July 8, 2015
Author(s)
Felipe Guzman, Yiliang Bao, Jason J. Gorman, John R. Lawall, Jacob M. Taylor, Thomas W. LeBrun
Current acceleration primary standards reach relative uncertainties of the order of 0.001 and consist of complex test facilities, typically operated at National Metrology Institutes. Our research focuses on the development of silicon mechanical oscillator

Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism

April 30, 2013
Author(s)
Mohammad Olfatnia, Siddharth Sood, Jason J. Gorman, Shorya Awtar
This paper reports in-plane electrostatic combdrive actuators with stroke as large as 245 μm that is achieved by employing a novel Clamped Paired Double Parallelogram (C-DPDP) flexure mechanism. The C-DP-DP flexure mechanism design offers high bearing

Automated Multiprobe Microassembly using Vision Feedback

October 5, 2012
Author(s)
John D. Wason, John T. Wen, Jason J. Gorman, Nicholas Dagalakis
This paper describes the algorithm development and experimental results of a vision-guided multi-probe microassembly system. The key focus is to develop the capabilities required for the construction of three dimensional (3D) structures using only planar

A high-bandwidth electromagnetic MEMS motion stage for scanning applications

August 23, 2012
Author(s)
Young M. Choi, Nicholas G. Dagalakis, Jason J. Gorman, Seung Ho Yang, Yong Sik Kim, Jae M. Yoo
This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as