Gorman, J.
, Kim, Y.
, Vladar, A.
and Dagalakis, N.
(2006),
Design of an On-Chip Micro-Scale Nanoassembly System, Proceedings of the International Symposium on Nanomanufacturing | 2006| ISN, Cambridge, MA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823599
(Accessed May 1, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Design of an On-Chip Micro-Scale Nanoassembly System
Published
Author(s)
, , ,
Abstract
In this paper, the design and proposed operation of a MEMS-based nanoassembly system is presented. The nanoassembly system is comprised of four nanomanipulators that can work independently or cooperatively. The design of the nanomanipulators will be discussed and experimental characterization results for one nanomanipulator will be presented. Three critical research issues for this project are then discussed: nanomanipulation strategies using the nanoassembly system; MEMS precision motion control; and integration of the on-chip nanoassembly system with a scanning electron microscope / focused ion beam instrument to obtain a complete nanomanufacturing environment.Proceedings Title
Proceedings of the International Symposium on Nanomanufacturing | 2006| ISN
Conference Dates
November 3, 2006
Conference Location
Cambridge, MA, USA
Conference Title
International Symposium on Nanomanufacturing
Pub Type
Conferences
Download Paper
Keywords
MEMS, nanoassembly, nanomanipulation
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 2, 2006, Updated October 12, 2021