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Design Optimization for a Parallel MEMS Mechanism with Flexure Joints



Byoung H. Kang, J Wen, Nicholas Dagalakis, Jason J. Gorman


This paper presents an analysis tool and design method forMEMS parallel mechanisms. Due to processing constraints inMEMS fabrication, flexure joints are frequently used in MEMSmechanisms. Flexure joints offer advantages over other joint designdue to their monolithic characteristics. They can be usedto reduce the size of manipulators or to increase the precisionof motion. Their inherent flexibility, however, also results in taskspace compliance which needs to be carefully designed to matchthe task specification. This paper presents an analysis and designtool for such mechanisms by using the differential kinematics.Performance metrics are chosen based on manipulability andtask stiffness matrices, which in turn are used in a multi-objectiveoptimization. As an illustrative example, a 1-DOF MEMS parallelmechanism based on the macro- and meso-scale modelsdesigned by NIST is considered with several choices of performancemetrics and design variables. The resulting designs aresuccessfully fabricated using DRIE process.
Proceedings Title
Proceedings of ASME Design Engineering Technical Conferences
Conference Dates
September 28-October 2, 2004
Conference Location
Salt Lake City, UT, USA
Conference Title
ASME Design Engineering Technical Conference


flexure, MEMS, optimization, parallel mechanism


Kang, B. , Wen, J. , Dagalakis, N. and Gorman, J. (2004), Design Optimization for a Parallel MEMS Mechanism with Flexure Joints, Proceedings of ASME Design Engineering Technical Conferences, Salt Lake City, UT, USA, [online], (Accessed April 12, 2024)
Created October 3, 2004, Updated October 12, 2021