@conference{840261, author = {Byoung Kang and J Wen and Nicholas Dagalakis and Jason Gorman}, title = {Design Optimization for a Parallel MEMS Mechanism with Flexure Joints}, year = {2004}, number = {DETC2004/MECH-57455}, month = {2004-10-04 00:10:00}, publisher = {Proceedings of ASME Design Engineering Technical Conferences, Salt Lake City, UT, USA}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822367}, language = {en}, }