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Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering

Published

Author(s)

Jason J. Gorman, Nicholas Dagalakis, B G. Boone
Proceedings Title
Proceedings of SPIE Vol. 5160
Conference Dates
August 4-6, 2003
Conference Location
San Diego, CA, USA
Conference Title
SPIE Vol. 5160

Keywords

beam jitter, beam steering, Control, Micro/Nano Systems, multi-loop control, nanopositioner, optical communication

Citation

Gorman, J. , Dagalakis, N. and Boone, B. (2003), Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering, Proceedings of SPIE Vol. 5160, San Diego, CA, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822582 (Accessed April 21, 2024)
Created August 7, 2003, Updated October 12, 2021