@conference{841256,
  author = {Jason Gorman and Nicholas Dagalakis and B Boone},
  title = {Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering},
  year = {2003},
  month = {2003-08-08 00:08:00},
  publisher = {Proceedings of SPIE Vol. 5160, San Diego, CA, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822582},
  language = {en},
}