TY  - CONF
AU  - Jason Gorman
AU  - Nicholas Dagalakis
AU  - B Boone
C2  - Proceedings of SPIE Vol. 5160, San Diego, CA, USA
DA  - 2003-08-08 00:08:00
LA  - en
PB  - Proceedings of SPIE Vol. 5160, San Diego, CA, USA
PY  - 2003
TI  - Multi-loop control of a nanopositioning mechanism for ultra-precision beam steering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822582
ER  -