A New Microdevice for SI-Traceable Forces in Atomic Force Microscopy

Published

June 2, 2008

Author(s)

Gregory W. Vogl, Jason J. Gorman, Gordon A. Shaw, Jon R. Pratt

Abstract

A new self-excited micro-oscillator is proposed as a velocity standard for dissemination of nanoNewton-level forces that are traceable to the International System of Units (SI). The microfabricated oscillator is top-coated with magnetic thin films and closely surrounded with conductive microwires to enable both magnetic sensing and actuation. An analog control system will keep the actuation side of the device oscillating sinusoidally with a frequency up to 200 kHz and a nanometer-level amplitude that is fairly insensitive to the quality factor. Consequently, the device can be calibrated as a velocity standard in air and used in ultra-high vacuum with a velocity shift of less than one percent. Because of the nanometer-level oscillation amplitude, the microdevice could be used to probe capacitance gradients near tips of cantilevers used for atomic force microscopy (AFM). Hence, the calibrated micro-oscillator could be used with electrostatic forces to calibrate AFM cantilevers as SI-traceable force transducers for fundamental metrology of electrical and mechanical nanoscale quantities.

Proceedings Title

SEM XI International Congress & Exposition on Experimental and Applied Mechanics

Conference Dates

June 2-5, 2008

Conference Location

Orlando, FL

Pub Type

Conferences

Download Paper

Local Download

Keywords

AFM cantilever calibration, electrostatic forces, limit cycle, magnetic actuation, magnetic sensing, micro-oscillator, Si-traceable nanoforces, velocity standard.

Citation

Vogl, G. , Gorman, J. , Shaw, G. and Pratt, J. (2008), A New Microdevice for SI-Traceable Forces in Atomic Force Microscopy, SEM XI International Congress & Exposition on Experimental and Applied Mechanics, Orlando, FL, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824627 (Accessed December 12, 2024)