Olfatnia, M.
, Sood, S.
, Gorman, J.
and Awtar, S.
(2012),
Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism, Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911098
(Accessed April 19, 2024)
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Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism
Published
Author(s)
Mohammad Olfatnia, Siddharth Sood, , Shorya Awtar
Abstract
This paper reports in-plane electrostatic comb-drive actuators with stroke as large as 245 µm, achieved by employing a novel Clamped Paired Double Parallelogram (C-DP-DP) flexure mechanism. For a given flexure beam length (L1), comb gap (G), and actuation voltage (V), this is currently the largest comb-drive actuator stroke reported in the literature. The C-DP-DP flexure mechanism design offers high bearing direction stiffness (Kx) while maintaining low motion direction stiffness (Ky), over a large range of motion direction displacement. The resulting high (Kx /Ky) ratio mitigates the on-set of sideways snap-in instability, thereby offering significantly greater actuation stroke compared to existing designs.Proceedings Title
Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop
Conference Dates
June 3-7, 2012
Conference Location
Hilton Head, SC, US
Pub Type
Conferences
Download Paper
Keywords
Microelectromechanical systems, MEMS, electrostatic actuator, flexure mechanism, large stroke actuator
Citation
Created June 19, 2012, Updated October 12, 2021