Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism

Published

Author(s)

Mohammad Olfatnia, Siddharth Sood, Jason J. Gorman, Shorya Awtar

Abstract

This paper reports in-plane electrostatic comb-drive actuators with stroke as large as 245 µm, achieved by employing a novel Clamped Paired Double Parallelogram (C-DP-DP) flexure mechanism. For a given flexure beam length (L1), comb gap (G), and actuation voltage (V), this is currently the largest comb-drive actuator stroke reported in the literature. The C-DP-DP flexure mechanism design offers high bearing direction stiffness (Kx) while maintaining low motion direction stiffness (Ky), over a large range of motion direction displacement. The resulting high (Kx /Ky) ratio mitigates the on-set of sideways snap-in instability, thereby offering significantly greater actuation stroke compared to existing designs.
Proceedings Title
Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop
Conference Dates
June 3-7, 2012
Conference Location
Hilton Head, SC, US

Keywords

Microelectromechanical systems, MEMS, electrostatic actuator, flexure mechanism, large stroke actuator

Citation

Olfatnia, M. , Sood, S. , Gorman, J. and Awtar, S. (2012), Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism, Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911098 (Accessed February 22, 2024)
Created June 19, 2012, Updated October 12, 2021