TY  - CONF
AU  - Mohammad Olfatnia
AU  - Siddharth Sood
AU  - Jason Gorman
AU  - Shorya Awtar
C2  - Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US
DA  - 2012-06-20 00:06:00
LA  - en
PB  - Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US
PY  - 2012
TI  - Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911098
ER  -