@conference{788206,
  author = {Mohammad Olfatnia and Siddharth Sood and Jason Gorman and Shorya Awtar},
  title = {Large Stroke Electrostatic Comb-Drive Actuators Based on a Novel Flexure Mechanism},
  year = {2012},
  month = {2012-06-20 00:06:00},
  publisher = {Proceedings of the Hilton Head 2012: Solid-state Sensors, Actuators and Microsystems Workshop, Hilton Head, SC, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911098},
  language = {en},
}