Choi, Y.
, Dagalakis, N.
, Gorman, J.
, , S.
, , Y.
and Yoo, J.
(2012),
A high-bandwidth electromagnetic MEMS motion stage for scanning applications, Journal of Micromechanics and Microengineering, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910087
(Accessed October 10, 2025)
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A high-bandwidth electromagnetic MEMS motion stage for scanning applications
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Author(s)
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Abstract
This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as linear characteristics. A planar microcoil and a permanent magnet generate Lorentz force, which drives the flexure-supported platform directly. The copper microcoil is electroplated on a silicon substrate and the platform is fabricated through silicon bulk micromachining of silicon-on-insulator wafers. The resonance frequency of the fabricated micro stage is 2.0 kHz which can give an open-loop control bandwidth larger than 500 Hz. Experimental results verify highly linear bidirectional motion without any hysteresis or nonlinearity. Also, excellent high-frequency open-loop tracking control performance is demonstrated.Citation
Journal of Micromechanics and Microengineering
Volume
22
Issue
10
Pub Type
Journals
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Keywords
MEMS, scanning, electromagnetic actuator
Citation
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Created August 23, 2012, Updated February 19, 2017