A high-bandwidth electromagnetic MEMS motion stage for scanning applications
Young M. Choi, Nicholas G. Dagalakis, Jason J. Gorman, Seung Ho Yang, Yong Sik Kim, Jae M. Yoo
This paper presents the design, fabrication and experimental results of an out-of-plane electromagnetic motion stage. The combination of electromagnetic actuation and a flexure-supported platform enables bidirectional motion with high precision as well as linear characteristics. A planar microcoil and a permanent magnet generate Lorentz force, which drives the flexure-supported platform directly. The copper microcoil is electroplated on a silicon substrate and the platform is fabricated through silicon bulk micromachining of silicon-on-insulator wafers. The resonance frequency of the fabricated micro stage is 2.0 kHz which can give an open-loop control bandwidth larger than 500 Hz. Experimental results verify highly linear bidirectional motion without any hysteresis or nonlinearity. Also, excellent high-frequency open-loop tracking control performance is demonstrated.