TY  - JOUR
AU  - Young Choi
AU  - Nicholas Dagalakis
AU  - Jason Gorman
AU  - Seung
AU  - Yong
AU  - Jae Yoo
C2  - Journal of Micromechanics and Microengineering
DA  - 2012-08-23
LA  - en
M1  - 22
PB  - Journal of Micromechanics and Microengineering
PY  - 2012
TI  - A high-bandwidth electromagnetic MEMS motion stage for scanning applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910087
ER  -