@article{12436,
  author = {Young Choi and Nicholas Dagalakis and Jason Gorman and Seung and Yong and Jae Yoo},
  title = {A high-bandwidth electromagnetic MEMS motion stage for scanning applications},
  year = {2012},
  number = {22},
  month = {2012-08-23},
  publisher = {Journal of Micromechanics and Microengineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910087},
  language = {en},
}