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Design of an on-chip microscale nanoassembly system



Jason J. Gorman, Yong Sik Kim, Andras Vladar, Nicholas G. Dagalakis


A microscale nanoassembly system has been designed for the fabrication of nanodevices and in situ electromechanical characterisation of nanostructures. This system consists of four Microelectromechanical Systems(MEMS)-based nanomanipulators positioned around a centrally located port for introducing nanostructure samples. Each nanomanipulator is composed of an XYZ nanopositioning mechanism with an attached nanoprobe for interacting with the nanostructures. By simultaneously controlling the position of each of these nanoprobes, they can be used to cooperatively assemble complex structures. The static and dynamic motion characteristics of a prototype nanomanipulator have been measured, providing a non-linear calibration of the quasi-static input-output behaviour, as well as values for the system bandwidth and structural natural frequencies. Important operational issues including proposed manipulation schemes, precision motion control and integration with a Scanning Electron Microscope/Focused Ion Beam (SEM/FIB) instrument are also discussed.
International Journal of Nanotechnology


nanoassembly, probe-based nanomanipulation, nanomanipulator, microelectromechanical systems, MEMS


Gorman, J. , , Y. , Vladar, A. and Dagalakis, N. (2009), Design of an on-chip microscale nanoassembly system, International Journal of Nanotechnology, [online], (Accessed April 14, 2024)
Created February 10, 2009, Updated February 19, 2017