Bao, Y.
, Zhou, F.
, LeBrun, T.
and Gorman, J.
(2017),
A Photonic MEMS Accelerometer with a Low-Finesse Hemispherical Microcavity Readout, 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923744
(Accessed September 20, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
A Photonic MEMS Accelerometer with a Low-Finesse Hemispherical Microcavity Readout
Published
Author(s)
, , ,
Abstract
This paper describes the design, fabrication, and testing of a photonic MEMS accelerometer that uses a hemispherical microcavity to transduce the motion of the proof mass. The cavity design provides stable operation that is relatively tolerant of misalignment errors. The prototype sensor is shown to have optical resonances that closely match the expected Airy function model.Proceedings Title
2017 International Conference on Optical MEMS and Nanophotonics
Conference Dates
August 13-17, 2017
Conference Location
Santa Fe, NM, US
Pub Type
Conferences
Download Paper
Keywords
Hemispherical microcavity, Fabry-Pérot, accelerometer, photonic MEMS.
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 12, 2017, Updated October 12, 2021