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A Photonic MEMS Accelerometer with a Low-Finesse Hemispherical Microcavity Readout



Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman


This paper describes the design, fabrication, and testing of a photonic MEMS accelerometer that uses a hemispherical microcavity to transduce the motion of the proof mass. The cavity design provides stable operation that is relatively tolerant of misalignment errors. The prototype sensor is shown to have optical resonances that closely match the expected Airy function model.
Proceedings Title
2017 International Conference on Optical MEMS and Nanophotonics
Conference Dates
August 13-17, 2017
Conference Location
Santa Fe, NM


Hemispherical microcavity, Fabry-Pérot, accelerometer, photonic MEMS.
Created August 13, 2017, Updated September 20, 2017