TY  - CONF
AU  - Yiliang Bao
AU  - Feng Zhou
AU  - Thomas LeBrun
AU  - Jason Gorman
C2  - 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US
DA  - 2017-08-13 00:08:00
LA  - en
PB  - 2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US
PY  - 2017
TI  - A Photonic MEMS Accelerometer with a Low-Finesse Hemispherical Microcavity Readout
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923744
ER  -