@conference{807916,
  author = {Yiliang Bao and Feng Zhou and Thomas LeBrun and Jason Gorman},
  title = {A Photonic MEMS Accelerometer with a Low-Finesse Hemispherical Microcavity Readout},
  year = {2017},
  month = {2017-08-13 00:08:00},
  publisher = {2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923744},
  language = {en},
}