Gokhale, V.
and Gorman, J.
(2018),
Identifying spurious modes in RF-MEMS resonators using photoelastic imaging, IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018), Belfast, UK, [online], https://doi.org/10.1109/MEMSYS.2018.8346671
(Accessed December 4, 2024)