@conference{820436, author = {Vikrant Gokhale and Jason Gorman}, title = {Identifying spurious modes in RF-MEMS resonators using photoelastic imaging}, year = {2018}, month = {2018-01-21 00:01:00}, publisher = {IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018), Belfast, UK}, doi = {https://doi.org/10.1109/MEMSYS.2018.8346671}, language = {en}, }